Sputtering studies with the Monte Carlo Program TRIM.SP
نویسندگان
چکیده
منابع مشابه
Monte Carlo simulations of magnetron sputtering particle transport
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ژورنال
عنوان ژورنال: Applied Physics A Solids and Surfaces
سال: 1984
ISSN: 0721-7250,1432-0630
DOI: 10.1007/bf00614759